Spectroscopy and Spectral Analysis, Volume. 30, Issue 12, 3179(2010)

Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering

GUO Qing-lin*... CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting and CHEN Jin-zhong |Show fewer author(s)
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    References(6)

    [1] [1] Huang Hanchen, Wei H L, Woo C H, et al. Applied Physics Letters, 2002, 81(23): 4359.

    [2] [2] Corbella C, Rubio-Roy M, Bertran E, et al. Journal of Applied Physics, 2009, 106(3): 033302.

    [5] [5] Nisha M, Saji K J, Ajimsha R S, et al. Journal of Applied Physics, 2006, 99(3): 033304.

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    GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179

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    Paper Information

    Received: Feb. 26, 2010

    Accepted: --

    Published Online: Jan. 26, 2011

    The Author Email: Qing-lin GUO (qlguo@hbu.edu.cn)

    DOI:

    CSTR:32186.14.

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