Spectroscopy and Spectral Analysis, Volume. 30, Issue 12, 3179(2010)
Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering
References(6)
[1] [1] Huang Hanchen, Wei H L, Woo C H, et al. Applied Physics Letters, 2002, 81(23): 4359.
[2] [2] Corbella C, Rubio-Roy M, Bertran E, et al. Journal of Applied Physics, 2009, 106(3): 033302.
[5] [5] Nisha M, Saji K J, Ajimsha R S, et al. Journal of Applied Physics, 2006, 99(3): 033304.
[7] [7] Lecceur Ph, Mercey B, Murray H. Journal of Applied Physics, 1995, 78(2): 1247.
[8] [8] Kakati H, Pal A R, Bailung H, et al. Journal of Applied Physics, 2007, 101(8): 083304.
[11] [11] Klabunde F, Lohmann M, Blasing J, et al. Journal of Applied Physics, 1996, 80(11): 6266.
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GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179
Paper Information
Received: Feb. 26, 2010
Accepted: --
Published Online: Jan. 26, 2011
The Author Email: Qing-lin GUO (qlguo@hbu.edu.cn)
CSTR:32186.14.
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