Spectroscopy and Spectral Analysis, Volume. 30, Issue 12, 3179(2010)
Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering
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GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179
Paper Information
Received: Feb. 26, 2010
Accepted: --
Published Online: Jan. 26, 2011
The Author Email: Qing-lin GUO (qlguo@hbu.edu.cn)
CSTR:32186.14.
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