Acta Optica Sinica, Volume. 19, Issue 8, 1110(1999)
Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method
References(3)
[1] [1] Rai-Choudhury P. Handbook of Lithography. Bellingham: SPIE Optical Engineering Press, 1997.
[2] [2] Levenson M D, Viswanathan N S, Simpson R A. Improving resolution in photolithography with a phase shifting mask. IEEE Trans. Electron Devices, 1982, ED-29(12):1828～1836
[3] [3] Hopkins H H. On the diffraction theory of optical images. Proc. Roy. Soc., 1953, A217:408
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method[J]. Acta Optica Sinica, 1999, 19(8): 1110
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