Acta Optica Sinica, Volume. 19, Issue 8, 1110(1999)
Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method[J]. Acta Optica Sinica, 1999, 19(8): 1110