Acta Optica Sinica, Volume. 19, Issue 8, 1110(1999)
Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method
Attenuated phase shifting mask (PSM) and that with optical proximity correction are adopted to improve resolution of photolithography based on some calculation results. And a new method of making attenuated PSM by encoding is proposed, and the theoretical calculation results are accordant to that of the conventional attenuated mask.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of Attenuated Phase-Shifting Mask and Its Encoding Making Method[J]. Acta Optica Sinica, 1999, 19(8): 1110