Semiconductor Optoelectronics, Volume. 45, Issue 1, 29(2024)
Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation
[7] [7] Ejeian F, Azadi S, Razmjou A, et al. Design and applications of MEMS flow sensors: A review[J]. Sensors and Actuators A: Physical, 2019, 295: 483-502.
[8] [8] Xu W, Wang X, Mousa B, et al. A CMOS MEMS thermal flow sensor for gas and liquid with parylene-C coating[J]. IEEE Trans. on Electron Devices, 2020, 68(2): 919-922.
[9] [9] Herbert R, Lim H R, Rigo B, et al. Fully implantable wireless batteryless vascular electronics with printed soft sensors for multiplex sensing of hemodynamics[J]. Science Advances, 2022, 8(19): eabm1175.
[10] [10] Park J, Kim J K, Kim D S, et al. Wireless pressure sensor integrated with a 3D printed polymer stent for smart health monitoring[J]. Sensors and Actuators B: Chemical, 2019, 280: 201-209.
[11] [11] Zhu C, Guo D, Ye D, et al. Flexible PZT-integrated, bilateral sensors via transfer-free laser lift-off for multimodal measurements[J]. ACS Appl. Materials & Interfaces, 2020, 12(33): 37354-37362.
[12] [12] Li H, Liu H, Sun M, et al. 3D interfacing between soft electronic tools and complex biological tissues[J]. Advanced Materials, 2021, 33(3): 2004425.
[13] [13] Fang Y, Wang S, Liu Y, et al. Development of Cu nanoflowers modified the flexible needle-type microelectrode and its application in continuous monitoring glucose in vivo[J]. Biosensors and Bioelectronics, 2018, 110: 44-51.
[15] [15] Kim T H, Kim S J. Development of a micro-thermal flow sensor with thin-film thermocouples[J]. J. of Micromechanics and Microengineering, 2006, 16(11): 2502.
[16] [16] Ashauer M, Glosch H, Hedrich F, et al. Thermal flow sensor for liquids and gases[C]// Proc. MEMS 98 IEEE, 1998: 351-355.
[19] [19] Li Z, Wang J, Zhong X, et al. Temperature-compensated fiber-optic gas flow speed sensor based on the ‘Hot-wire’ principle[J]. Optik, 2021, 241: 166118.
[20] [20] Zhang H D, Zhang P L, Li Y H, et al. A wearable ultrathin flexible sensor inserted into nasal cavity for precise sleep respiratory monitoring[J]. IEEE Trans. on Electron Devices, 2021, 68(8): 4090-4097.
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HUANG Haokai, HU Zhiyuan, YE Fengming, YANG Zhuoqing. Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation[J]. Semiconductor Optoelectronics, 2024, 45(1): 29
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Received: Oct. 18, 2023
Accepted: --
Published Online: Jun. 25, 2024
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