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Semiconductor Optoelectronics, Volume. 45, Issue 1, 29(2024)

Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation

HUANG Haokai1...2, HU Zhiyuan1,2, YE Fengming1,2 and YANG Zhuoqing1 |Show fewer author(s)
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    HUANG Haokai, HU Zhiyuan, YE Fengming, YANG Zhuoqing. Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation[J]. Semiconductor Optoelectronics, 2024, 45(1): 29

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    Received: Oct. 18, 2023

    Accepted: --

    Published Online: Jun. 25, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023101801

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology