Acta Photonica Sinica, Volume. 53, Issue 11, 1106002(2024)

Research on the Application of Single-crystal MgO in High Temperature Optical Fiber Sensing Technology

Jia LIU1,*... Yukang LIAO1, Jiacheng TU1, Jiashun LI2 and Hao LIU1 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China
  • 2Division of Optical fiber Application Technology,The 46th Research Institute of China Electronic Technology Corporation,Tianjin 300220,China
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    References(23)

    [1] K SCHADOW, W HORN, H PFOERTNER. Sensor and actuator needs for more intelligent gas turbine engines(2010).

    [2] P WADE, R PATRICK. High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine-engine component testing, 4578, 229-238(2002).

    [3] S W GUO, H ERIKSEN, K CJILDRESS et al. High temperature smart-cut SOI pressure sensor. Sensors and Actuators A: Physical, 154, 255-260(2009).

    [4] H DUONG, B MUKHOPADHYAY, O EHRMANN et al. Advanced liquid-free, piezoresistive, SOI-based pressure sensors for measurements in harsh environments. Sensors, 15, 20305-20315(2015).

    [5] R S OKOJIE, D LUKCO, V NGUYEN et al. 4H-SiC Piezoresistive pressure sensors at 800°C with observed sensitivity recovery. IEEE Electronic Device Letters, 36, 174-176(2015).

    [6] T K NGUYEN, H P PHAN, T DINH. Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures. Materials & Design, 156, 441-445(2018).

    [7] J J XIONG, Y LI, Y P HONG et al. Wireless LTCC-based capacitive pressure sensor for harsh environment. Sensors and Actuators A: Physical, 197, 30-37(2013).

    [8] B LEE. Review of the present status of optical fiber sensors. Optics and Laser Technology, 9, 57-79(2003).

    [9] R MIN, Z LIIU, L PEREIRA et al. Optical fiber sensing for marine environment and marine structural health monitoring: A review. Optics and Laser Technology, 140, 107082(2021).

    [10] Y JIANG, E LALLY, A WANG et al. Demonstration of an all-sapphire Fabry-Perot cavity for pressure sensing. IEEE Photonics Technology Letters, 23, 9-11(2010).

    [11] Wenhao LI, Pinggang JIA, Jun WANG et al. High sensitivity micro fiber Fabry Perot pressure sensor based on silicon MEMS technology. Acta Photonica Sinica, 53, 0553110(2024).

    [12] J S LI, P G JIA, G C FANG et al. Batch-producible all-silica fiber-optic Fabry-Perot pressure sensor for high-temperature applications up to 800 °C. Sensors and Actuators: A Physical, 334, 113363(2022).

    [13] Jiashun LI, Pinggang JIA, Jun WANG et al. Silica-MEMS-based Fiber-optic Fabry-Perot pressure sensor for high-temperature applications. Acta Photonica Sinica, 51, 0606005(2022).

    [14] Z W MA, J T CHEN, H M WEI et al. Compound Fabry-Pérot interferometer for simultaneous high-pressure and high-temperature measurement. Optics Express, 29, 24289-24299(2021).

    [15] Y JIANG. Sapphire Fabry-Perot pressure sensor at high temperature. IEEE Sensors Journal, 21, 1596-1602(2021).

    [16] W W LI, T LIANG, P G JIA et al. Fiber-optic Fabry-Perot pressure sensor based on sapphire direct bonding for high-temperature applications. Applied Optics, 58, 1662-1666(2019).

    [17] Yi JIANG, Yutong ZHANG, Hui DENG. An Optical fiber pressure sensor based on sapphire wafers processed by femtosecond laser. Acta Optica Sinica, 43, 90-97(2023).

    [18] Y T ZHANG, Y JIANG, H DENG et al. An all-sapphire-based optical fiber pressure sensor with an ultra-wide pressure range based on femtosecond laser micromachining and direct bonding. Optics Express, 31, 41967-41978(2023).

    [19] Z Q SHAO, Y L WU, S WANG. All-sapphire fiber-optic pressure sensors for extreme harsh environments. Optics Express, 30, 3665-3674(2022).

    [20] Z WANG, J CHEN, H WEI et al. Sapphire Fabry-Perot interferometer for high-temperature pressure sensing. Applied Optics, 59, 5189-5196(2020).

    [21] J LIU, P G JIA, F FENG et al. MgO single crystals MEMS-based fiber-optic Fabry-Perot pressure sensor for harsh monitoring. IEEE Sensors Journal, 21, 4272-4279(2021).

    [22] C X SU, P G JIA, A H ZHAO et al. Temperature-decoupled single-crystal MgO fiber-optic Fabry-Perot vibration sensor based on MEMS technology for harsh environments. Micromachines, 15, 616(2024).

    [23] J LIU, P G JIA, X Y CHEN et al. Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices. Journal of Micromechanics and Microengineering, 30, 015001(2020).

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    Jia LIU, Yukang LIAO, Jiacheng TU, Jiashun LI, Hao LIU. Research on the Application of Single-crystal MgO in High Temperature Optical Fiber Sensing Technology[J]. Acta Photonica Sinica, 2024, 53(11): 1106002

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Jun. 26, 2024

    Accepted: Oct. 23, 2024

    Published Online: Jan. 8, 2025

    The Author Email: LIU Jia (jialiu@nuc.edu.cn)

    DOI:10.3788/gzxb20245311.1106002

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