Acta Photonica Sinica, Volume. 53, Issue 11, 1106002(2024)
Research on the Application of Single-crystal MgO in High Temperature Optical Fiber Sensing Technology
[1] K SCHADOW, W HORN, H PFOERTNER. Sensor and actuator needs for more intelligent gas turbine engines(2010).
[2] P WADE, R PATRICK. High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine-engine component testing, 4578, 229-238(2002).
[3] S W GUO, H ERIKSEN, K CJILDRESS et al. High temperature smart-cut SOI pressure sensor. Sensors and Actuators A: Physical, 154, 255-260(2009).
[4] H DUONG, B MUKHOPADHYAY, O EHRMANN et al. Advanced liquid-free, piezoresistive, SOI-based pressure sensors for measurements in harsh environments. Sensors, 15, 20305-20315(2015).
[5] R S OKOJIE, D LUKCO, V NGUYEN et al. 4H-SiC Piezoresistive pressure sensors at 800°C with observed sensitivity recovery. IEEE Electronic Device Letters, 36, 174-176(2015).
[6] T K NGUYEN, H P PHAN, T DINH. Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures. Materials & Design, 156, 441-445(2018).
[7] J J XIONG, Y LI, Y P HONG et al. Wireless LTCC-based capacitive pressure sensor for harsh environment. Sensors and Actuators A: Physical, 197, 30-37(2013).
[8] B LEE. Review of the present status of optical fiber sensors. Optics and Laser Technology, 9, 57-79(2003).
[9] R MIN, Z LIIU, L PEREIRA et al. Optical fiber sensing for marine environment and marine structural health monitoring: A review. Optics and Laser Technology, 140, 107082(2021).
[10] Y JIANG, E LALLY, A WANG et al. Demonstration of an all-sapphire Fabry-Perot cavity for pressure sensing. IEEE Photonics Technology Letters, 23, 9-11(2010).
[11] Wenhao LI, Pinggang JIA, Jun WANG et al. High sensitivity micro fiber Fabry Perot pressure sensor based on silicon MEMS technology. Acta Photonica Sinica, 53, 0553110(2024).
[12] J S LI, P G JIA, G C FANG et al. Batch-producible all-silica fiber-optic Fabry-Perot pressure sensor for high-temperature applications up to 800 °C. Sensors and Actuators: A Physical, 334, 113363(2022).
[13] Jiashun LI, Pinggang JIA, Jun WANG et al. Silica-MEMS-based Fiber-optic Fabry-Perot pressure sensor for high-temperature applications. Acta Photonica Sinica, 51, 0606005(2022).
[14] Z W MA, J T CHEN, H M WEI et al. Compound Fabry-Pérot interferometer for simultaneous high-pressure and high-temperature measurement. Optics Express, 29, 24289-24299(2021).
[15] Y JIANG. Sapphire Fabry-Perot pressure sensor at high temperature. IEEE Sensors Journal, 21, 1596-1602(2021).
[16] W W LI, T LIANG, P G JIA et al. Fiber-optic Fabry-Perot pressure sensor based on sapphire direct bonding for high-temperature applications. Applied Optics, 58, 1662-1666(2019).
[17] Yi JIANG, Yutong ZHANG, Hui DENG. An Optical fiber pressure sensor based on sapphire wafers processed by femtosecond laser. Acta Optica Sinica, 43, 90-97(2023).
[18] Y T ZHANG, Y JIANG, H DENG et al. An all-sapphire-based optical fiber pressure sensor with an ultra-wide pressure range based on femtosecond laser micromachining and direct bonding. Optics Express, 31, 41967-41978(2023).
[19] Z Q SHAO, Y L WU, S WANG. All-sapphire fiber-optic pressure sensors for extreme harsh environments. Optics Express, 30, 3665-3674(2022).
[20] Z WANG, J CHEN, H WEI et al. Sapphire Fabry-Perot interferometer for high-temperature pressure sensing. Applied Optics, 59, 5189-5196(2020).
[21] J LIU, P G JIA, F FENG et al. MgO single crystals MEMS-based fiber-optic Fabry-Perot pressure sensor for harsh monitoring. IEEE Sensors Journal, 21, 4272-4279(2021).
[22] C X SU, P G JIA, A H ZHAO et al. Temperature-decoupled single-crystal MgO fiber-optic Fabry-Perot vibration sensor based on MEMS technology for harsh environments. Micromachines, 15, 616(2024).
[23] J LIU, P G JIA, X Y CHEN et al. Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices. Journal of Micromechanics and Microengineering, 30, 015001(2020).
Get Citation
Copy Citation Text
Jia LIU, Yukang LIAO, Jiacheng TU, Jiashun LI, Hao LIU. Research on the Application of Single-crystal MgO in High Temperature Optical Fiber Sensing Technology[J]. Acta Photonica Sinica, 2024, 53(11): 1106002
Category: Fiber Optics and Optical Communications
Received: Jun. 26, 2024
Accepted: Oct. 23, 2024
Published Online: Jan. 8, 2025
The Author Email: LIU Jia (jialiu@nuc.edu.cn)