Fig. 1. Single-crystal MgO pressure sensor

Fig. 2. Mechanical simulation analysis of the sensor

Fig. 3. Displacement distribution of sensor sensitive unit at different temperatures

Fig. 4. Modal ansysis of square diaphragm

Fig. 5. MEMS processing of MgO high-temperature pressure sensor

Fig. 6. MgO wafer surface graphics processing and SEM images of the etched-cavity

Fig. 7. Schematic of MgO sealed-cavity direct bonding process

Fig. 8. MgO-based pressure sensor integration

Fig. 9. Pressure response results of sensor at room temperature

Fig. 10. Experimental setup of the sensor for high-temperature pressure test

Fig. 11. Results of the temperature-pressure composite test of the sensor

Fig. 12. Stability test results of pressure cavity length of sensor