Acta Photonica Sinica, Volume. 50, Issue 9, 0912001(2021)
Development of Miniature Optical Encoder for Precise Displacement Measurement
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Fig. 2. Schematic diagram of double grating interferometric scanning measurement system
Fig. 3. Schematic diagram of the diffraction efficiency of the dual grating system
Fig. 4. Curve of interference signal contrast of
Fig. 6. Reading head and measuring grating of grating displacement sensor
Fig. 11. Comparison of measurement results of grating encoder and capacitance sensor
Table 1. Displacement measurement results of grating encoder and capacitive sensor
View tableView in ArticleTable 1. Displacement measurement results of grating encoder and capacitive sensor
Tests Displacement measured by grating encoder Displacement measured by capacitive sensor 1 4.956 4.847 2 4.928 4.812 3 4.998 4.870 4 4.953 4.841 5 4.921 4.839 Standard deviation/μm 0.030 5 0.020 8
Table 2. Partial performance comparison between grating sensor and other systems
View tableView in ArticleTable 2. Partial performance comparison between grating sensor and other systems
Performance Grating encoder LDGI system HEIDENHAIN LIP481 Size 32 mm×28 mm×15 mm 50 mm×45 mm×24 mm 28 mm×18 mm×24 mm Grating pitch 1 μm 1 μm 4 μm Signal period 500 nm 500 nm 2 μm Repeatability ±30 nm ±10 nm ±0.5 μm Short-term stability 5 nm - 2 nm
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Zhengjie WEI, Di ZHANG, Guanhao WU. Development of Miniature Optical Encoder for Precise Displacement Measurement[J]. Acta Photonica Sinica, 2021, 50(9): 0912001
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: May. 9, 2021
Accepted: Jun. 17, 2021
Published Online: Oct. 22, 2021
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