Acta Photonica Sinica, Volume. 50, Issue 9, 0912001(2021)

Development of Miniature Optical Encoder for Precise Displacement Measurement

Zhengjie WEI, Di ZHANG, and Guanhao WU
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing100084, China
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    Based on the principle of double grating interference scanning, the miniaturized development of the interference scanning type grating encoder is realized by multiplexing transmission grating. A prototype grating encoder was developed suitable for precision displacement measurement. The circuit system of the sensor includes a signal conversion amplifier circuit and a signal processing circuit placed in the D-SUB shell. The 15-pin interface outputs four analog differential signals with a level of 2.5±0.5 V, which can be used for high subdivision to achieve high resolution, With RS422 interface adaptability, it can also improve the anti-interference ability of the sensor in long-distance transmission. The capacitance sensor is used as the displacement reference. The principle prototype of the grating encoder achieves a repeatability accuracy of ±30 nm, and meets the measurement speed requirement of 10 mm/s. The short-term displacement stability of 10 s reaches 5 nm, and the long-term stability of 6 hours reaches 70 nm.

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    Zhengjie WEI, Di ZHANG, Guanhao WU. Development of Miniature Optical Encoder for Precise Displacement Measurement[J]. Acta Photonica Sinica, 2021, 50(9): 0912001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 9, 2021

    Accepted: Jun. 17, 2021

    Published Online: Oct. 22, 2021

    The Author Email:

    DOI:10.3788/gzxb20215009.0912001

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