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Spectroscopy and Spectral Analysis, Volume. 33, Issue 4, 1108(2013)

Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film

FU Si-lie1,*... WANG Chun-an2 and CHEN Jun-fang1 |Show fewer author(s)
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  • 2[in Chinese]
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    FU Si-lie, WANG Chun-an, CHEN Jun-fang. Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film[J]. Spectroscopy and Spectral Analysis, 2013, 33(4): 1108

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    Paper Information

    Received: Sep. 3, 2012

    Accepted: --

    Published Online: Apr. 8, 2013

    The Author Email: Si-lie FU (fusl@scnu.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2013)04-1108-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology