Bulletin of the Chinese Ceramic Society, Volume. 43, Issue 10, 3814(2024)
Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates
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SHI Yunlong, LIN Rongchuan, WEI Shasha, SUI Yusheng, DONG Tianlei. Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates[J]. Bulletin of the Chinese Ceramic Society, 2024, 43(10): 3814
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Received: Apr. 14, 2024
Accepted: Jan. 17, 2025
Published Online: Jan. 17, 2025
The Author Email: Rongchuan LIN (rongchuan@jmu.edu.cn)
CSTR:32186.14.