Bulletin of the Chinese Ceramic Society, Volume. 43, Issue 10, 3814(2024)

Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates

SHI Yunlong... LIN Rongchuan*, WEI Shasha, SUI Yusheng and DONG Tianlei |Show fewer author(s)
Author Affiliations
  • College of Marine Equipment and Mechanical Engineering, Jimei University, Xiamen 361021, China
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    References(10)

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    [9] [9] CHIU K A, WU P H, PENG C Y, et al. Homoepitaxial growth and stress analysis of (111) diamond film with embedded gold islands[J]. Vacuum, 2015, 118: 104-108.

    [10] [10] SEIDL W M, BARTOSIK M, KOLOZSVRI S, et al. Influence of coating thickness and substrate on stresses and mechanical properties of (Ti, Al, Ta)N/(Al, Cr)N multilayers[J]. Surface and Coatings Technology, 2018, 347: 92-98.

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    [19] [19] GRUEN D M, LIU S Z, KRAUSS A R, et al. Buckyball microwave plasmas: fragmentation and diamond-film growth[J]. Journal of Applied Physics, 1994, 75(3): 1758-1763.

    [22] [22] CHASON E, SHELDON B W, FREUND L B, et al. Origin of compressive residual stress in polycrystalline thin films[J]. Physical Review Letters, 2002, 88(15): 156103.

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    SHI Yunlong, LIN Rongchuan, WEI Shasha, SUI Yusheng, DONG Tianlei. Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates[J]. Bulletin of the Chinese Ceramic Society, 2024, 43(10): 3814

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    Paper Information

    Category:

    Received: Apr. 14, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email: Rongchuan LIN (rongchuan@jmu.edu.cn)

    DOI:

    CSTR:32186.14.

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