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Bulletin of the Chinese Ceramic Society, Volume. 43, Issue 10, 3814(2024)

Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates

SHI Yunlong... LIN Rongchuan*, WEI Shasha, SUI Yusheng and DONG Tianlei |Show fewer author(s)
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  • College of Marine Equipment and Mechanical Engineering, Jimei University, Xiamen 361021, China
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    SHI Yunlong, LIN Rongchuan, WEI Shasha, SUI Yusheng, DONG Tianlei. Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates[J]. Bulletin of the Chinese Ceramic Society, 2024, 43(10): 3814

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    Paper Information

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    Received: Apr. 14, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email: Rongchuan LIN (rongchuan@jmu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology