Infrared and Laser Engineering, Volume. 53, Issue 5, 20240061(2024)

Research on decoupling method for six-degree-of-freedom displacement measurement based on PSD

Wenjiang Fu1,2, Zengxiong Lu1,2, Xiaobin Wu1,2, Yufeng Huang1,2, Bin Gao1, and Xuetong Chen1,2
Author Affiliations
  • 1R & D Center of Optoelectronic Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    [13] C S Liu, Y F Pu, Y T Chen, et al. Design of a measurement system for simultaneously measuring six-degree-of-freedom geometric errors of a long linear stage. Sensors, 18, 3875(2018).

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    Wenjiang Fu, Zengxiong Lu, Xiaobin Wu, Yufeng Huang, Bin Gao, Xuetong Chen. Research on decoupling method for six-degree-of-freedom displacement measurement based on PSD[J]. Infrared and Laser Engineering, 2024, 53(5): 20240061

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    Paper Information

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    Received: Feb. 4, 2024

    Accepted: --

    Published Online: Jun. 21, 2024

    The Author Email:

    DOI:10.3788/IRLA20240061

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