Infrared and Laser Engineering, Volume. 53, Issue 5, 20240061(2024)

Research on decoupling method for six-degree-of-freedom displacement measurement based on PSD

Wenjiang Fu1,2, Zengxiong Lu1,2, Xiaobin Wu1,2, Yufeng Huang1,2, Bin Gao1, and Xuetong Chen1,2
Author Affiliations
  • 1R & D Center of Optoelectronic Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(9)
    Schematic diagram of six-degree-of-freedom displacement measurement. (a) Top view; (b) Front view
    Plane rectangular coordinate system on PSD. (a) Top view; (b) Bird’s view
    Decomposition of plane Cartesian coordinate system on PSD
    Calculation error of single degree-of-freedom translation displacement
    Calculation error of single degree-of-freedom rotational displacement
    Frequency distribution histogram of 6DOF solution error
    • Table 1. Extreme value of calculation error introduced by displacement in x direction

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      Table 1. Extreme value of calculation error introduced by displacement in x direction

      DisplacementNCSA
      δx/mm8.88×10−161.07×10−14
      δy/mm8.34×10−168.70×10−15
      δz/mm7.58×10−161.12×10−15
      δRx/mrad1.13×10−141.41×10−13
      δRy/mrad7.82×10−156.46×10−13
      δRz/mrad3.52×10−156.02×10−14
    • Table 2. Extreme value of calculation error introduced by displacement in Rx direction

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      Table 2. Extreme value of calculation error introduced by displacement in Rx direction

      DisplacementNCSA
      δx/mm1.32×10−175.39×10−3
      δy/mm1.38×10−175.39×10−3
      δz/mm6.60×10−173.03×10−3
      δRx/mrad1.73×10−153.55×10−2
      δRy/mrad1.15×10−153.55×10−2
      δRz/mrad1.18×10−162.51×10−2
    • Table 3. Average error of 6DOF displacement solution

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      Table 3. Average error of 6DOF displacement solution

      DisplacementNCSA
      δx/mm−1.2×10−174.2×10−6
      δy/mm−1.6×10−174.2×10−6
      δz/mm−1.1×10−174.4×10−3
      δRx/mrad−9.9×10−172.8×10−5
      δRy/mrad−9.6×10−172.8×10−5
      δRz/mrad−3.7×10−17−2.0×10−5
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    Wenjiang Fu, Zengxiong Lu, Xiaobin Wu, Yufeng Huang, Bin Gao, Xuetong Chen. Research on decoupling method for six-degree-of-freedom displacement measurement based on PSD[J]. Infrared and Laser Engineering, 2024, 53(5): 20240061

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    Paper Information

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    Received: Feb. 4, 2024

    Accepted: --

    Published Online: Jun. 21, 2024

    The Author Email:

    DOI:10.3788/IRLA20240061

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