Laser & Optoelectronics Progress, Volume. 52, Issue 7, 72203(2015)

Aberration Compensation Analysis of Active Deformable Lens in Lithographic Objective Lens

Dong Lijian*, Zhao Lei, Zhang Defu, Yu Xinfeng, Ni Mingyang, and Li Xianling
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    References(14)

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    Dong Lijian, Zhao Lei, Zhang Defu, Yu Xinfeng, Ni Mingyang, Li Xianling. Aberration Compensation Analysis of Active Deformable Lens in Lithographic Objective Lens[J]. Laser & Optoelectronics Progress, 2015, 52(7): 72203

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 19, 2015

    Accepted: --

    Published Online: Jun. 19, 2015

    The Author Email: Lijian Dong (donglj@ciomp.ac.cn)

    DOI:10.3788/lop52.072203

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