Laser & Optoelectronics Progress, Volume. 52, Issue 7, 72203(2015)
Aberration Compensation Analysis of Active Deformable Lens in Lithographic Objective Lens
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Dong Lijian, Zhao Lei, Zhang Defu, Yu Xinfeng, Ni Mingyang, Li Xianling. Aberration Compensation Analysis of Active Deformable Lens in Lithographic Objective Lens[J]. Laser & Optoelectronics Progress, 2015, 52(7): 72203
Paper Information
Category: Optical Design and Fabrication
Received: Jan. 19, 2015
Accepted: --
Published Online: Jun. 19, 2015
The Author Email: Lijian Dong (donglj@ciomp.ac.cn)
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