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Bulletin of the Chinese Ceramic Society, Volume. 42, Issue 9, 3395(2023)

Fabrication of Quartz Crystal Resonator by Inductively Coupled Plasma Etching Method

CHEN Jingbai1,*... ZHANG Xinhai1 and LIU Feng2 |Show fewer author(s)
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    CHEN Jingbai, ZHANG Xinhai, LIU Feng. Fabrication of Quartz Crystal Resonator by Inductively Coupled Plasma Etching Method[J]. Bulletin of the Chinese Ceramic Society, 2023, 42(9): 3395

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    Paper Information

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    Received: May. 16, 2023

    Accepted: --

    Published Online: Nov. 3, 2023

    The Author Email: Jingbai CHEN (12032216@mail.sustech.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology