Fig. 1. Schematic diagram of the experimental device driven by piezoelectric shear stack

Fig. 2. Two-dimensional, three-dimensional morphology and cross section of nanogrooves processed by AFM scanning tapping

Fig. 3. Three-dimensional topography of nanogrooves at 0.4 V/0.4 V, 0.6 V/0.6 V, 0.8 V/0.8 V, 100 Hz/500 Hz /1 500 Hz

Fig. 4. Post-processing flowchart

Fig. 5. Trajectory projection and its fitting circle under the condition of 0.4 V/0.4 V, 0.6 V/0.6 V, 0.8 V/0.8 V, 100 Hz/500 Hz/1 500 Hz

Fig. 6. Trajectory projection and its fitting circle under 0.4 V/0.8V, 10 Hz/200 Hz/600 Hz/1 000 Hz

Fig. 7. Change of trajectory radius with voltage and frequency

Fig. 8. Change of trajectory radius at high frequency and the trajectory morphology at high frequency