High Power Laser and Particle Beams, Volume. 36, Issue 8, 089003(2024)
Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories
Aiming at the displacement measurement problem of two-dimensional high-frequency motion of two-axis piezoelectric shear stacks driven by high-frequency voltage, a method for measuring the displacement of piezoelectric shear stacks by using the machining trajectories of atomic force microscope (AFM) probe in tapping mode was proposed. Firstly, the thermoplastic polymer polymethyl methacrylate (PMMA) film was prepared, and then the AFM probe tapping experiment was carried out. By scanning the processing trajectory of the AFM probe and post-processing it, the two-dimensional high-frequency motion displacement of the piezoelectric shear stack was successfully obtained. Accurate detection of two-dimensional high-frequency complex motion of piezoelectric shear stacks in a semi-contact manner is realized. Based on the experimental data, the variation of the two-dimensional motion displacement of the piezoelectric shear stack with the voltage amplitude and frequency is analyzed.
Get Citation
Copy Citation Text
Ruonan Yin, Bo Xue, Jinming Zhang, Zhe Wu. Measurement of two-dimensional high-frequency motion displacement of piezoelectric shear stack using atomic force microscope tapping trajectories[J]. High Power Laser and Particle Beams, 2024, 36(8): 089003
Category: Advanced Interdisciplinary Science
Received: Oct. 23, 2023
Accepted: Dec. 3, 2024
Published Online: Aug. 8, 2024
The Author Email: Xue Bo (xuebo@nefu.edu.cn)