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Optics and Precision Engineering, Volume. 16, Issue 8, 1440(2008)

Phase transformations of grinding monocrystalline silicon wafer surfaces

ZHANG Yin-xia1,*... GAO Wei1, KANG Ren-ke2 and GUO Dong-ming2 |Show fewer author(s)
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  • 2[in Chinese]
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    ZHANG Yin-xia, GAO Wei, KANG Ren-ke, GUO Dong-ming. Phase transformations of grinding monocrystalline silicon wafer surfaces[J]. Optics and Precision Engineering, 2008, 16(8): 1440

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    Received: Jan. 7, 2008

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Yin-xia ZHANG (zhangyinxia@zzu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology