[1] [1] NI Q L, LIU SH J, CHEN B. Investigation on extreme ultraviolet photon-counting imaging detector with position sensitive anode ［J］. Chinese Journal of Optics and Applied Optics, 2009,22(1):36-40. (in Chinese)

[2] [2] HE L P. Study of imaging characteristics of EUV photon counting detector ［D］. Beijing:Dissertation for Doctor Degree of Chinese Academy of Sciences, 2010,4:34-49. (in Chinese)

[3] [3] WANG G M. Study on WSZ Detector of 30.4nm EUV Imager ［D］. Beijing:Dissertation for Doctor Degree of Chinese Academy of Sciences, 2006,19-24, 41-48. (in Chinese)

[4] [4] NI Q L, HE L P, LIU SH J, et al.. Extreme ultraviolet single photon counting imaging system based on induced charge position-sensitive anode ［J］. Opt. Precision Eng., 2010,18(12): 2543-2548. (in Chinese)

[5] [5] HE L P, NI Q L, LI M,et al.. The imaging non linearity of position sensitive detector based on wedge-strip anode ［J］. Journal of Optoelectronics·Laser,2010,21(4): 512-515. (in Chinese)

[6] [6] HE L P, NI Q L, LI M,et al.. Image performance of photon-counting imaging detector with wedge and strip anode ［J］. Opt. Precision Eng., 2009,17(11):2699-2704. (in Chinese)

[7] [7] LAPINGTON J S,SMITH A D,WALTON D M. Micro channel plate pore size limited imaging with ultra-thin wedge and strip anodes ［J］. IEEE Transactions on Nuclear Science, 1987,34(1): 431-433.

[8] [8] X K Z. Technology of Particle Detector［M］.Hefei: University of Science and Technology of China,136-146. (in Chinese)

[9] [9] WEI Y Y, TAO ZH M. Optimal Design of the MCP Inclined Angle［J］. Infrared Technology, 1994,16(2):19-21.(in Chinese)

[10] [10] YAN J L,MENG SH Y.The study of gain fatigue mechanism of MCP ［J］.Applied Optics,1996,17(4) :25-28.(in Chinese)