Optics and Precision Engineering, Volume. 20, Issue 12, 2674(2012)
Correction of crosstalk and fake signal trigger of EUV imager
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WANG Xiao-dong, ZHU Xiao-ming, LV Bao-lin, LIU Wen-guang. Correction of crosstalk and fake signal trigger of EUV imager[J]. Optics and Precision Engineering, 2012, 20(12): 2674
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Received: Jul. 23, 2012
Accepted: --
Published Online: Jan. 7, 2013
The Author Email: Xiao-dong WANG (wangxd@ciomp.ac.com)