Optics and Precision Engineering, Volume. 20, Issue 12, 2674(2012)

Correction of crosstalk and fake signal trigger of EUV imager

WANG Xiao-dong1,*... ZHU Xiao-ming1,2, LV Bao-lin1 and LIU Wen-guang1 |Show fewer author(s)
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    WANG Xiao-dong, ZHU Xiao-ming, LV Bao-lin, LIU Wen-guang. Correction of crosstalk and fake signal trigger of EUV imager[J]. Optics and Precision Engineering, 2012, 20(12): 2674

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    Received: Jul. 23, 2012

    Accepted: --

    Published Online: Jan. 7, 2013

    The Author Email: Xiao-dong WANG (wangxd@ciomp.ac.com)

    DOI:10.3788/ope.20122012.2674

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