[1] [1] 1崔晶， 王迪凡. X-Y精密定位平台的敏感函数逆前馈补偿控制［J］. 光学 精密工程， 2015，23（4）：1081-1087. doi: 10.3788/OPE.20152304.1081CUIJ， WANGD F. Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function［J］. Opt. Precision Eng.， 2015， 23（4）：1081-1087.（in Chinese）. doi: 10.3788/OPE.20152304.1081

[2] [2] 2王福超， 王昱棠， 田大鹏. 音圈快速反射镜的完全跟踪控制［J］. 光学 精密工程， 2020， 28（9）：1997-2006. doi: 10.37188/OPE.20202809.1997WANGF C， WANGY T， TIAND P. Perfect tracking control for fast-steering mirror driven by voice coil motor［J］. Opt. Precision Eng.， 2020， 28（9）：1997-2006.（in Chinese）. doi: 10.37188/OPE.20202809.1997

[3] [3] 3吴俊杰. 基于纳米测量机的微结构三维坐标测量［J］. 光学 精密工程， 2020， 28（10）：2252-2259. doi: 10.37188/OPE.20202810.2252WUJ J. Three-dimensional coordinate measurement of microstructures based on nano measuring machine［J］. Opt. Precision Eng.， 2020， 28（10）：2252-2259.（in Chinese）. doi: 10.37188/OPE.20202810.2252

[4] S ITO, S TROPPMAIR, B LINDNER et al. Long-range fast nanopositioner using nonlinearities of hybrid reluctance actuator for energy efficiency. IEEE Transactions on Industrial Electronics, 66, 3051-3059(2019).

[5] Q XU. New flexure parallel-kinematic micropositioning system with large workspace. IEEE Transactions on Robotics, 28, 478-491(2011).

[6] G PARMAR, K BARTON, S AWTAR. Large dynamic range nanopositioning using iterative learning control. Precision engineering, 38, 48-56(2014).

[7] E CSENCSICS, J SCHLARP, G SCHITTER. High-performance hybrid-reluctance-force-based tip/tilt system： Design， control， and evaluation. IEEE/ASME Transactions on Mechatronics, 23, 2494-2502(2018).

[8] Z ZHANG, X YANG, P YAN. Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction. Mechanical Systems and Signal Processing, 117, 757-770(2019).

[9] S KANG, M G LEE, Y M CHOI. Six Degrees-of-Freedom Direct-Driven Nanopositioning Stage using Crab-Leg Flexures. IEEE/ASME Transactions on Mechatronics, 513(2020).

[10] [10] 10戴一帆， 段纬然， 王贵林等. 音圈电机驱动的快刀伺服系统建模与性能分析［J］. 国防科技大学学报，2008，30（1）：78-82. doi: 10.3969/j.issn.1001-2486.2008.01.017DAIY F， DUANW R， WANGG L， et al. Modeling and performance analysis of fast knife servo system driven by voice coil motor［J］. Journal of National University of Defense Technology，2008，30（1）：78-82（in Chinese）. doi: 10.3969/j.issn.1001-2486.2008.01.017

[11] [11] 11谢晓丹， 王博超， 吴丹. 电磁驱动快速刀具伺服机构的电磁场和驱动力［J］. 清华大学学报（自然科学版），2008，48（8），72-75. doi: 10.3321/j.issn:1000-0054.2008.08.019XIES D， WANGB C， WUD. Electromagnetic field and driving force of electromagnetic driven fast tool servo mechanism［J］. Journal of Tsinghua University （Science and Technology）， 2008，48（8）： 72-75.（in Chinese）. doi: 10.3321/j.issn:1000-0054.2008.08.019

[12] K CAI, Y TIAN, X LIU et al. Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robotics and Computer-Integrated Manufacturing, 56, 95-105(2019).

[13] S Z XI, L J LAI. Paired double parallelogram flexure mechanism clamped by corrugated beam for underconstraint elimination. Rev.Sci.Instrum, 91(2020).

[14] K S KIM, Q ZOU. A Modeling-Free Inversion-Based Iterative Feedforward Control for Precision Output Tracking of Linear Time-Invariant Systems. IEEE/ASME Transactions on Mechatronics, 18, 1767-1777(2013).