Fig. 1. Experimental setup of compliant micropositioning stage driven by voice coil motor

Fig. 2. Measured frequency responses in different positions

Fig. 3. Measured and identified frequency response

Fig. 4. Bode diagram of uncorrected system before and after adjusting open-loop gain

Fig. 5. Open loop frequency response using PI controller with phase lead compensation

Fig. 6. Schematic diagram of the compound iterative learning control in inverse frequency domain

Fig. 7. Simulink module of frequency domain inverse iterative control

Fig. 8. Target curve tracking renderings of different control modes

Fig. 9. Tracking results of triangular trajectories with different frequencies

Fig. 10. Convergence effect of root mean square （RMS） errors using frequency domain inverse iteration