Optics and Precision Engineering, Volume. 29, Issue 9, 2149(2021)

Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform

Xu ZHANG1... Lei-jie LAI1,*, Peng-zhi LI2,3 and Li-min ZHU4 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai20600,China
  • 2Changchun Institute of Optic, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun130033,China
  • 3School of Computing and Engineering, University of Gloucestershire, Cheltenham, GL50 2RH, UK
  • 4State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai20020, China
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    To overcome the problems of low damping resonance and different dynamics properties in the large-range compliant micro-positioning stage driven by a voice coil motor, a compound closed-loop frequency-domain inverse iterative learning control method based on data-driven frequency-domain inverse iterative feedforward compensation and PI feedback control with phase-lead compensation is used for high-speed and high-precision control. First, the micro-positioning stage with a double-parallelogram flexure mechanism driven by a voice coil motor is built, and a dynamics model is identified for different working positions. Then, a PI feedback controller with phase-lead compensation is designed to improve the relative stability of the positioning system. Input and output data are then used for online inverse estimation of the system frequency response function, which can be used as feedforward compensation to further eliminate the resonance effect. Finally, tracking experiments are conducted using the proposed control method, which is then compared with other methods. Experimental results show that the maximum tracking error for the triangular trajectory using the proposed control method is 0.175%. Compared with a PID control, phase-leading PI control, and transfer function inverse feedforward control, the root mean square errors of tracking are reduced by 8.75, 5.43, and 2.21 times, respectively, which can better meet the requirements of high tracking accuracy, fast speed, and strong anti-interference ability of large stroke micro/nano-positioning.

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    Xu ZHANG, Lei-jie LAI, Peng-zhi LI, Li-min ZHU. Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform[J]. Optics and Precision Engineering, 2021, 29(9): 2149

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jan. 24, 2021

    Accepted: --

    Published Online: Nov. 22, 2021

    The Author Email:

    DOI:10.37188/OPE.20212909.2149

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