An In-situ Method for Measuring the Wafer Flatness

Acta Photonica Sinica, Volume. 35, Issue 12, 1975(2006)

Zhang Dongqing1...2, Wang Xiangzhao1,* and Shi Weijie1 |Show fewer author(s)

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Zhang Dongqing, Wang Xiangzhao, Shi Weijie. An In-situ Method for Measuring the Wafer Flatness[J]. Acta Photonica Sinica, 2006, 35(12): 1975

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Received: Aug. 23, 2005

Accepted: --

Published Online: Jun. 3, 2010

The Author Email: Xiangzhao Wang (wxz26267@siom.ac.cn)

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