Optics and Precision Engineering, Volume. 29, Issue 10, 2432(2021)
Environmental humidity control method for structural reading and writing based on micropipette probe
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Xiao-bo LIAO, Jian ZHUANG, Lei CHENG, Jiu-lin YANG, Qiang-qiang ZHENG. Environmental humidity control method for structural reading and writing based on micropipette probe[J]. Optics and Precision Engineering, 2021, 29(10): 2432
Category: Micro/Nano Technology and Fine Mechanics
Received: Apr. 7, 2021
Accepted: --
Published Online: Nov. 23, 2021
The Author Email: Jian ZHUANG (zhuangjian@mail.xjtu.edu.cn)