Optics and Precision Engineering, Volume. 29, Issue 10, 2432(2021)

Environmental humidity control method for structural reading and writing based on micropipette probe

Xiao-bo LIAO1...2, Jian ZHUANG1,*, Lei CHENG1, Jiu-lin YANG2 and Qiang-qiang ZHENG1 |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an70049, China
  • 2School of Manufacturing Science and Engineering, Key Laboratory of Testing Technology for Manufacturing Process, Minsitry of Education, Southwest University of Science and Technology, Mianyang61010, China
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    Xiao-bo LIAO, Jian ZHUANG, Lei CHENG, Jiu-lin YANG, Qiang-qiang ZHENG. Environmental humidity control method for structural reading and writing based on micropipette probe[J]. Optics and Precision Engineering, 2021, 29(10): 2432

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Apr. 7, 2021

    Accepted: --

    Published Online: Nov. 23, 2021

    The Author Email: ZHUANG Jian (zhuangjian@mail.xjtu.edu.cn)

    DOI:10.37188/OPE.20212910.2432

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