Optics and Precision Engineering, Volume. 29, Issue 10, 2432(2021)
Environmental humidity control method for structural reading and writing based on micropipette probe
Figures & Tables(12)
Fig. 1. Schematic of micro-environment humidity control system with double buffer structure
Fig. 3. Single/bilateral inflation steady-state humidity cloud chart and relative humidity curve
Fig. 4. 0.1 m·s
Fig. 5. Influence of bilateral inflation rate on operating neighborhood points velocity disturbance
Fig. 8. Scanning imaging results under different environmental humidity
Fig. 9. Probe status after MCED deposition in different humidity environments
Fig. 10. MCED deposition structure under different humidity environments
Table 1. Control results of relative humidity at different flow rates
View tableView in ArticleTable 1. Control results of relative humidity at different flow rates
稳态误差 上升时间（分钟）
（工作点/邻域点）
单侧流速
（0.053 m·s-1）
8.22% 10.5/8.5 双侧流速
（0.053~0.025 m·s-1）
6.2% 8.3/7.6 双侧同流速
（0.053 m·s-1）
2.59% 4.9/4.5
Table 2. Depositon speed at different relative humidity（probe tip diameter is 1 μm， 0.05 ML CuSO4， electrode voltage 0.05 V）
View tableView in ArticleTable 2. Depositon speed at different relative humidity（probe tip diameter is 1 μm， 0.05 ML CuSO4， electrode voltage 0.05 V）
相对湿度 38% 65% 75% 90% 生长速度/（n·ms-1） 152.3 92.1 82.5 35.2 法拉第电流/nA 4.64 3.02 1.78 0.82
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Xiao-bo LIAO, Jian ZHUANG, Lei CHENG, Jiu-lin YANG, Qiang-qiang ZHENG. Environmental humidity control method for structural reading and writing based on micropipette probe[J]. Optics and Precision Engineering, 2021, 29(10): 2432
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Apr. 7, 2021
Accepted: --
Published Online: Nov. 23, 2021
The Author Email: ZHUANG Jian (zhuangjian@mail.xjtu.edu.cn)
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