Optics and Precision Engineering, Volume. 23, Issue 3, 769(2015)

MEMS based electrochemical seismic sensors with planar electrodes

[in Chinese]... [in Chinese]*, [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(13)

    [1] [1] CHEN D Y,LI G B,WANG J B,et al..A micro electrochemical seismic sensor based on MEMS technologies[J].Sensors and Actuators A:Physical,2013,202:85-89.

    [2] [2] LI G B,CHEN D Y,WANG J B,et al..A MEMS based seismic sensor using the electrochemical approach[J].Procedia Engineering,2012,47:362-365.

    [3] [3] KOZLOV V A,AGAFONOV V M.Convective accelerometer:USA,Patent 20050257616A1[P].2005.

    [4] [4] KOZLOV V A,AGAFONOV V M.Convective accelerometer with positive or negative inertial mass:USA,Patent 20080216571A1[P].2008.

    [5] [5] LEVCHENKO D G,KUZIN I P,SAFONOV M V,et al..Experience in seismic signal recording using broadband electrochemical seismic sensors[J].Seismic Instruments,2010,46(3):250-264.

    [6] [6] HE W T,CHEN D Y,LI G B,et al..Low frequency electrochemical accelerometer with low noise based on MEMS[J].Key Engineering Materials,2012,503:75-80.

    [7] [7] KOZLOV V A,TERENTEV D A.Transfer function of a diffusion transducer at frequencies exceeding the thermodynamic frequency[J].Russian Journal of Electrochemistry,2003,39(4):401-406.

    [8] [8] AGAFONOV V M,NESTEROV A S.Convective current in a four-electrode electrochemical cell at various boundary conditions at anodes[J].Russian Journal of Electrochemistry,2005,41(8):880-884.

    [9] [9] AGAFONOV V M,KRISHTOP V G.Diffusion sensor of mechanical signals:Frequency response at high frequencies[J].Russian Journal of Electrochemistry,2004,40(5):537-541.

    [10] [10] KOZLOV V A,SAFONOV M V.Dynamic characteristic of an electrochemical cell with gauze electrodes in convective diffusion conditions[J].Russian Journal of Electrochemistry,2004,40(4):460-462.

    [11] [11] SUN Z Y,AGAFONOV V M.3D numerical simulation of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer[J].Sensors and Actuators B:Chemical,2010,146(1):231-238.

    [12] [12] SUN Z Y,AGAFONOV V M.Computational study of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer with an infinite aspect ratio[J].Electrochemical Acta,2010,55(6):2036-2043.

    [13] [13] DENG T,CHEN D Y,WANG J B,et al..A MEMS based electrochemical vibration sensor for seismic motion monitoring[J].Journal of Microelectromechanical Systems,2014,23(1):92-99.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MEMS based electrochemical seismic sensors with planar electrodes[J]. Optics and Precision Engineering, 2015, 23(3): 769

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 20, 2014

    Accepted: --

    Published Online: Apr. 20, 2015

    The Author Email: (stephenkung@126.com)

    DOI:10.3788/ope.20152303.0769

    Topics