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Optics and Precision Engineering, Volume. 23, Issue 3, 769(2015)

MEMS based electrochemical seismic sensors with planar electrodes

[in Chinese]... [in Chinese]*, [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MEMS based electrochemical seismic sensors with planar electrodes[J]. Optics and Precision Engineering, 2015, 23(3): 769

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    Received: May. 20, 2014

    Accepted: --

    Published Online: Apr. 20, 2015

    The Author Email: (stephenkung@126.com)

    DOI:10.3788/ope.20152303.0769

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology