Acta Photonica Sinica, Volume. 53, Issue 10, 1053402(2024)
Precision Processing Technology Based on Laser Filament(Invited)
With the advancement of science, traditional mechanical processing methods are no longer able to meet the processing needs of humans for various two-dimensional or three-dimensional micro nano structures. Therefore, over the past half century, a series of high-energy beam processing technologies have rapidly developed. For example, electron beam processing, ion beam processing, and beam processing technologies with different wavelengths from extreme ultraviolet to near-infrared. This article discusses the principle of laser filament processing, lists typical applications of laser filament processing technology, and explores the main challenges and urgent scientific problems faced by laser filament processing technology. This article provides a systematic review of the applications of laser filament in high aspect ratio microstructures, large aspect surface microstructures, biomaterial processing, and welding. Including the generation and regulation of cross medium laser filament, as well as the influence of excited state materials on the properties of laser filament. Compared with traditional laser processing technology, laser filament precision processing technology can achieve efficient preparation of micro nano structures without precise focusing while maintaining micro/nano processing accuracy.Femtosecond laser filament processing is a complex physical process involving multiple disciplines such as light, heat, force, and materials. Femtosecond laser filament processing is a complex physical process involving multiple disciplines such as light, heat, force, and materials. Femtosecond laser filament processing involves the generation and regulation of cross dielectric filaments, as well as the influence of excited state materials on filament properties and many other scientific issues that need to be addressed. Solving these fundamental scientific problems is beneficial for accurately predicting and controlling material damage in the laser action area, improving the accuracy and quality of the processed surface, reducing material loss, and also achieving an improvement in the level of femtosecond laser wire processing technology.This article introduces the application of laser filament in microstructures with large aspect ratios, large surface microstructures, biomaterial processing, and welding, revealing the principle and practical application effects of femtosecond laser filament processing technology. This article introduces several mainstream applications of precision machining technology based on femtosecond laser filament:1) For the cutting technology of transparent hard and brittle materials, the mainstream cutting technologies currently include longitudinal multi focus cutting technology, Bessel beam cutting technology, and laser filament cutting technology. After years of development, precision machining technology based on femtosecond laser filament has become an indispensable key technology in modern industry and plays an increasingly important role in fields such as microelectronics, optics, and medicine. Laser filament cutting is widely used for cutting transparent materials due to its unique advantages.2) Currently, the communication frequency used in the sixth generation wireless communication is above 90 GHz, reaching the terahertz band. However, in the manufacturing of key devices in the terahertz band, achieving large-scale, high-precision, and high-efficiency device manufacturing is currently a huge challenge. The use of laser filament effect for precision machining of three-dimensional milling surfaces of curved components effectively avoids the interference of laser defocusing caused by changes in the height of the machined surface. Its high strength and long interaction range provide a new method for processing complex surfaces.3) Due to the cumulative effect of multiple pulse incidence, high repetition rate femtosecond laser filament can cause material melting. Therefore, femtosecond laser filament can also be used as a new type of transparent material micro welding/connection technology. In the manufacturing of biomaterials, femtosecond laser filament technology can be used to separate and cut cell tissues and biomaterials without being affected by material morphology, with high separation accuracy and good quality.This article analyzes how laser filament can achieve high-precision machining in these applications and explores the main challenges faced by this technology. These challenges include the generation and regulation of cross medium laser filament, as well as the influence of excited state materials on the properties of laser filament. The solution to these basic problems is beneficial for accurately predicting and controlling material damage in the laser action area, providing stronger preparation technology support for fields such as chips and electronics. The high intensity and large aspect ratio characteristics of laser filament make laser precision machining technology based on laser filament have important applications and broad development prospects in consumer electronics, chip manufacturing, communication, and medical fields.The materials that can be processed using femtosecond laser filament processing technology in the future include transparent hard and brittle materials, polymer materials, biomaterials and tissues, as well as metal materials, which have huge application prospects in industrial technology fields such as consumer electronics, chip manufacturing, communication, and healthcare. The main market for precision laser processing in China will gradually shift from general electronic component processing to upstream materials and core components, especially in the fields of semiconductor material preparation, biomedical, polymer materials, etc. The application technology of laser filament in the semiconductor chip industry will be increasingly invented, and for high-precision chip products, non-contact laser processing is the most suitable way. With the huge demand, the chip industry is highly likely to drive the next wave of demand for precision laser processing technology.
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Hongzhi HE, Zhaolin CHAI, Nan ZHANG, Weiwei LIU. Precision Processing Technology Based on Laser Filament(Invited)[J]. Acta Photonica Sinica, 2024, 53(10): 1053402
Category: Special Issue for Micro/Nanophotonics
Received: Aug. 15, 2024
Accepted: Sep. 26, 2024
Published Online: Dec. 5, 2024
The Author Email: LIU Weiwei (liuweiwei@nankai.edu.cn)