Infrared and Laser Engineering, Volume. 52, Issue 3, 20220468(2023)

Study on light source of low jitter excimer laser amplifier

Yizhe Wang, Xuehao Yu, Molin Liu, Nengwei Zhu*, Libing You, and Xiaodong Fang
Author Affiliations
  • College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
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    References(17)

    [3] [3] Zhang J. Preliminary study on ultraviolet ultrasht pulse laser energy stage ring technology [D]. Beijing: China Institute of Atomic Energy, 2003. (in Chinese)

    [8] Yanqi Liu, Keyang Liu, Yunhai Tang, et al. 100 TW optical amplifier based on Ti: sapphire splicing technology. Chinese Journal of Lasers, 48, 204-205(2021).

    CLP Journals

    [1] Xuehao Yu, Xiaodong Fang, Libing You, Yizhe Wang, Molin Liu, Hao Wang. Research progress of excimer laser annealing in semiconductor integrated circuit manufacturing[J]. Infrared and Laser Engineering, 2023, 52(12): 20230285

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    Yizhe Wang, Xuehao Yu, Molin Liu, Nengwei Zhu, Libing You, Xiaodong Fang. Study on light source of low jitter excimer laser amplifier[J]. Infrared and Laser Engineering, 2023, 52(3): 20220468

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    Paper Information

    Category: Lasers & Laser optics

    Received: Jul. 6, 2022

    Accepted: --

    Published Online: Apr. 12, 2023

    The Author Email: Zhu Nengwei (zhunengwei@sztu.edu.cn)

    DOI:10.3788/IRLA20220468

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