Fig. 1. Basic connection diagram between solid seed source and excimer laser amplifier module self-injection

Fig. 2. Internal working principle diagram of excimer laser amplifier

Fig. 3. Control signal sequence diagram

Fig. 4. Rising edge of light output signal

Fig. 5. (a) External light output signal and thyristor trigger signal; (b) After 30 min, the time jitter range of thyristor trigger signal is 4 ns

Fig. 6. Delay, delay drift and vibration of external light output signal control

Fig. 7. Stable delay time of different operating voltages under the same repetition frequency

Fig. 8. (a) Vibration time of optical pulse with repetition frequency of 5 Hz at 25 kV; (b) Vibration time of optical pulse with repetition frequency of 10 Hz at 26 kV; (c) Vibration time of optical pulse with repetition rate of 5 Hz at 25 kV after gas deterioration; (d) Vibration time of optical pulse with repetition rate of 10 Hz at 26 kV after gas deterioration