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Chinese Optics Letters, Volume. 8, Issue 1, 119(2010)

Evolution of stress in evaporated silicon dioxide thin films

Ming Fang1,2, Dafei Hu1,2, and Jianda Shao1
Author Affiliations
  • 1Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Graduate School of Chinese Academy of Sciences, Beijing 100049, China
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    CLP Journals

    [1] Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang. Improved phase-shifting diffraction interferometer for microsphere topography measurements[J]. Chinese Optics Letters, 2016, 14(7): 071202

    [2] Hongji Qi, Meipin Zhu, Ming Fang, Shuying Shao, Chaoyang Wei, Kui Yi, and Jianda Shao. Development of high-power laser coatings[J]. High Power Laser Science and Engineering, 2013, 1(1): 01000036

    Cited By

    [1] Simon Gelin, Delphine Poinot, Sébastien Chatel, Pierre-Jean Calba, Ana?l Lema?tre. Microstructural origin of compressive in situ stresses in electron-gun-evaporated silica thin films. Physical Review Materials, 3, 055608(2019).

    [2] Hongji Qi, Meipin Zhu, Ming Fang, Shuying Shao, Chaoyang Wei, Kui Yi, Jianda Shao. Development of high-power laser coatings. High Power Laser Science and Engineering, 1, 36(2013).

    [3] 龙 韦. Research of Blue Light Protection Films. Optoelectronics, 12, 94(2022).

    [4] Ming-Yu SHENG, Yuan ZHAO, Fu-Qiang LIU, Qiao-Duo HU, Yu-Xiang ZHENG, Liang-Yao CHEN. Low-temperature deposition of SiO2 nanophotonic film. JOURNAL OF INFRARED AND MILLIMETER WAVES, 30, 237(2012).

    [5] Tingting Zeng, Meiping Zhu, Yingjie Chai, Chaoyi Yin, Nuo Xu, Kui Yi, Yanzhi Wang, Yuanan Zhao, Guohang Hu, Jianda Shao. Effects of water adsorption on properties of electron-beam HfO2/SiO2 high-reflection coatings. Thin Solid Films, 697, 137826(2020).

    [6] Song Zhang, Hui Zhang, LiLi Zheng. Residual stress of physical vapor-deposited polycrystalline multilayers. Science China Physics, Mechanics & Astronomy, 58, 1(2015).

    [7] Jingping Li, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan, Zhaoyang Li. Growth stress evolution in HfO2/SiO2 multilayers. Thin Solid Films, 526, 70(2012).

    [8] Deep Panjwani, Mehmet Yesiltas, Janardan Nath, D.E. Maukonen, Imen Rezadad, Evan M. Smith, R.E. Peale, Carol Hirschmugl, Julia Sedlmair, Ralf Wehlitz, Miriam Unger, Glenn Boreman. Patterning of oxide-hardened gold black by photolithography and metal lift-off. Infrared Physics & Technology, 62, 94(2014).

    [9] Kate Malachowski, Mustapha Jamal, Qianru Jin, Beril Polat, Christopher J. Morris, David H. Gracias. Self-Folding Single Cell Grippers. Nano Letters, 14, 4164(2014).

    [10] Tingting Zeng, Meiping Zhu, Chaoyi Yin, Yun Cui, Jiaoling Zhao, Yanzhi Wang, Guohang Hu, Yingjie Chai, Jianda Shao. Strategy to improve the long-term stability of low-stress e-beam coatings. Optical Materials Express, 10, 2738(2020).

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    Ming Fang, Dafei Hu, Jianda Shao. Evolution of stress in evaporated silicon dioxide thin films[J]. Chinese Optics Letters, 2010, 8(1): 119

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    Paper Information

    Received: Mar. 31, 2009

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email:

    DOI:10.3788/COL20100801.0119

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology