Chinese Optics Letters, Volume. 8, Issue 1, 119(2010)

Evolution of stress in evaporated silicon dioxide thin films

Ming Fang1,2, Dafei Hu1,2, and Jianda Shao1
Author Affiliations
  • 1Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Graduate School of Chinese Academy of Sciences, Beijing 100049, China
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    Ming Fang, Dafei Hu, Jianda Shao. Evolution of stress in evaporated silicon dioxide thin films[J]. Chinese Optics Letters, 2010, 8(1): 119

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    Paper Information

    Received: Mar. 31, 2009

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email:

    DOI:10.3788/COL20100801.0119

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