Acta Optica Sinica, Volume. 33, Issue 4, 431001(2013)

Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method

Zhou Ming*, Chen Gang, and Liu Dingquan
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  • [in Chinese]
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    References(7)

    [1] [1] D. Amans, S. Callard, A. Gagnaire et al.. Ellipsometric study of silicon nanocrystal optical constants [J]. J. Appl. Phys., 2003, 93(7): 4173~4179

    [2] [2] P. L. Washington, H. C. Ong, J. Y. Dai et al.. Determination of the optical constants of zinc by spectroscopic ellipsometry [J]. Appl. Phys. Lett., 1998, 72(25): 3261~3263

    [5] [5] D. P. Arndt, R. M. A. Azzam, J. M. Bennett et al.. Multiple determine of the optical constants of thin-film coating materials [J]. Appl. Opt., 1984, 23(20): 3571~3593

    [6] [6] C. M. Herzinger, B. Johs, W. A. McGahan et al.. Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation [J]. J. Appl. Phys., 1998, 83(6): 3323~3336

    [7] [7] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization eviations of optical parameters of thin films caused by ellipsometric measurement systematic errors[J]. Acta Optica Sinica, 2012, 32(6): 0631001

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    Zhou Ming, Chen Gang, Liu Dingquan. Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method[J]. Acta Optica Sinica, 2013, 33(4): 431001

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    Paper Information

    Category: Thin Films

    Received: Oct. 26, 2012

    Accepted: --

    Published Online: Apr. 16, 2013

    The Author Email: Ming Zhou (zhouming@mail.sitp.ac.cn)

    DOI:10.3788/aos201333.0431001

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