Acta Optica Sinica, Volume. 33, Issue 4, 431001(2013)
Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method
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Zhou Ming, Chen Gang, Liu Dingquan. Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method[J]. Acta Optica Sinica, 2013, 33(4): 431001
Paper Information
Category: Thin Films
Received: Oct. 26, 2012
Accepted: --
Published Online: Apr. 16, 2013
The Author Email: Ming Zhou (zhouming@mail.sitp.ac.cn)
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