Infrared and Laser Engineering, Volume. 53, Issue 12, 20240426(2024)
Research on vacuum ultraviolet spectral responsivity calibration device based on synchrotron radiation
Figures & Tables(15)
Fig. 2. Optical path diagram of synchrotron radiation-based vacuum ultraviolet spectral responsivity calibration
Table 1. Output optical power stability test results
View tableView in ArticleTable 1. Output optical power stability test results
Duration of the test Signal strength/A Stability 1（20 min） 3.353E-09 0.26% 2（40 min） 3.349E-09 3（60 min） 3.348E-09 4（80 min） 3.350E-09 5（100 min） 3.355E-09 6（120 min） 3.357E-09
Table 2. Spectral responsivity measurements results
View tableView in ArticleTable 2. Spectral responsivity measurements results
Wavelength/nm Measured value/A·W−1 Average value/A·W−1 u1 1 2 3 4 5 6 10 0.2687 0.2648 0.2631 0.2661 0.2630 0.2696 0.266 0.40% 60 0.0897 0.0858 0.0776 0.0803 0.0773 0.0794 0.082 2.5% 100 0.0546 0.0505 0.0501 0.0509 0.0542 0.0537 0.052 1.4% 150 0.0767 0.0772 0.0771 0.0771 0.0769 0.0772 0.077 0.25% 200 0.0821 0.0817 0.0813 0.0823 0.0810 0.0818 0.082 0.24%
Table 3. Uncertainty components introduced by the instability of the vacuum ultraviolet beamline of the synchrotron radiation source
View tableView in ArticleTable 3. Uncertainty components introduced by the instability of the vacuum ultraviolet beamline of the synchrotron radiation source
Wavelength $\lambda $ Uncertainty components introduced by the instability of the vacuum ultraviolet beamline of the synchrotron radiation source u2 10-35 0.18% 35-130 0.18% 130-200 0.18%
Table 4. Uncertainty components introduced by standard detectors
View tableView in ArticleTable 4. Uncertainty components introduced by standard detectors
Wavelength $ \lambda$ Uncertainty components introduced by standard detectors u3 10-35 0.75% 35-130 3.5% 130-200 1.4%
Table 5. Uncertainty components introduced by data acquisition devices
View tableView in ArticleTable 5. Uncertainty components introduced by data acquisition devices
Wavelength $ \lambda$ Uncertainty components introduced by data acquisition devices u4 10-35 0.12% 35-130 0.12% 130-200 0.12%
Table 6. Spectral responsivity measurement uncertainty table
View tableView in ArticleTable 6. Spectral responsivity measurement uncertainty table
Sources of uncertainty Parameter Wavelength λ/nm 10-35 35-130 130-200 Measure the uncertainty component introduced by repeatability $ u_{1} $ 0.43% 2.2% 0.22% Uncertainty component introduced by the instability of the vacuum UV beamline of the synchrotron radiation source $ u_{2} $ 0.18% 0.18% 0.18% Uncertainty component introduced by the standard detector $ u_{3} $ 0.75% 3.5% 1.4% Uncertainty component introduced by the data acquisition device $ u_{4} $ 0.12% 0.12% 0.12% Relative synthesis standard uncertainty $ u_{c} $ 0.891% 4.14% 1.43% Relative extension uncertainty $ U $ 1.8% 8.7% 2.9%
Table 7. Measurement uncertainty of the calibration device
View tableView in ArticleTable 7. Measurement uncertainty of the calibration device
Wavelength/nm U U0 10 1.8% 2.2% 60 8.7% 8.8% 100 8.7% 10.6% 150 2.9% 3.0% 200 2.9% 3.1%
Table 8. Verification of spectral responsivity measurement uncertainty
View tableView in ArticleTable 8. Verification of spectral responsivity measurement uncertainty
Wavelength/nm The spectral responsivity obtained by this calibration device $ {S_{TA}} $ The spectral responsivity given by NIST $ {S_{TA_0}} $ Deviation $ \left|S_{T A}-S_{T A_0}\right| / S_{T A_0} $ $ {E_{{n}}} = \dfrac{{|{S_{TA}} - {S_{TA_0}}|/{S_{TA}}}}{{\sqrt {{U^2} + U_0^2} }} $ 10 0.266 0.269 1.12% 0.39 60 0.082 0.075 9.33% 0.75 100 0.052 0.055 5.45% 0.40 150 0.077 0.076 1.32% 0.32 200 0.082 0.080 2.50% 0.59 Criterion $ E_n $ Results $ E_n$ Device development goals 10-35 nm：U=2.0%(k=2)；35-130 nm：U=10%(k=2)；130-200 nm：U=3.0%(k=2) Conclusion Satisfy
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Hao YANG, Chunlian ZHAN, Guangwei SUN, Zhouhong ZHU, Jiapeng WANG, Jidong DU, Guoao ZHOU, Kui JIANG. Research on vacuum ultraviolet spectral responsivity calibration device based on synchrotron radiation[J]. Infrared and Laser Engineering, 2024, 53(12): 20240426
Paper Information
Category: 光电测量
Received: Sep. 21, 2024
Accepted: --
Published Online: Jan. 16, 2025
The Author Email: ZHU Zhouhong (181615904@qq.com)
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