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Journal of Inorganic Materials, Volume. 38, Issue 12, 1405(2023)

Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics

Yicun LI1... Xiaobin HAO1, Bing DAI1,*, Dongyue WEN1, Jiaqi ZHU1, Fangjuan GENG1, Weiping YUE2 and Weiqun LIN2,* |Show fewer author(s)
Author Affiliations
  • 11. School of Astronautics, Harbin Institute of Technology, Harbin 150000, China
  • 22. Shenzhen CSL Vacuum Science and Technology Co., LTD, Shenzhen 518000, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
    Equations (5)
    References (25)
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    Figures & Tables(10)
    HITLH-2450M diamond growth system and plasma diagnostic system
    1. HITLH-2450M diamond growth system and plasma diagnostic system

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    Pressure-microwave power parameter curves (a) and Hα intensity of plasma central region (b) under three matching modes
    2. Pressure-microwave power parameter curves (a) and Hα intensity of plasma central region (b) under three matching modes

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    At a certain pressure, change of reflected power (a) and change of Hα intensity (b) with input power
    3. At a certain pressure, change of reflected power (a) and change of Hα intensity (b) with input power

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    Atomic hydrogen concentration distributions in plasma at various observation parameter points under optimal absorption matching mode with similar distribution pattern changes in other modes
    4. Atomic hydrogen concentration distributions in plasma at various observation parameter points under optimal absorption matching mode with similar distribution pattern changes in other modes

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    Quantitative analysis of plasma in uniform increase and optimal absorption matching mode
    5. Quantitative analysis of plasma in uniform increase and optimal absorption matching mode

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    Changes in plasma major axis and minor axis (a), eccentricity (b), volume (c), and energy density (d) with input power under constant pressure with data at 16 kPa showing the selected display, and variation trends being similar under different pressures
    6. Changes in plasma major axis and minor axis (a), eccentricity (b), volume (c), and energy density (d) with input power under constant pressure with data at 16 kPa showing the selected display, and variation trends being similar under different pressures

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    Prediction map of MPCVD single crystal diamond growth process
    7. Prediction map of MPCVD single crystal diamond growth process

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    Photos of plasma growth environment of three samples (with Hα filter) and the surface optical micrographs after 10 h of growth
    8. Photos of plasma growth environment of three samples (with Hα filter) and the surface optical micrographs after 10 h of growth

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    Plasma emission spectra in the growth of single crystal diamond
    9. Plasma emission spectra in the growth of single crystal diamond

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    • Table 1. Parameter points selection based on the predicted map and growth parameters of actual single crystal diamond

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      Table 1. Parameter points selection based on the predicted map and growth parameters of actual single crystal diamond

      ParameterSample 1Sample 2Sample 3
      Preset growth temperature/℃850850850
      Preset major axis/mm484253
      Predicted pressure-microwave power14.2 kPa-3140 W15.6 kPa-2600 W12.8 kPa-3500 W
      Actual growth temperature/℃867860835
      Actual major axis/mm47.541.252.8
      Energy density/(W·cm-3)121.3148.5115.2
      Growth rate/(μm·h-1)8.58.98.2
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    Yicun LI, Xiaobin HAO, Bing DAI, Dongyue WEN, Jiaqi ZHU, Fangjuan GENG, Weiping YUE, Weiqun LIN. Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics[J]. Journal of Inorganic Materials, 2023, 38(12): 1405

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    Paper Information

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    Received: Apr. 4, 2023

    Accepted: --

    Published Online: Mar. 6, 2024

    The Author Email: DAI Bing (daibinghit@vip.126.com), LIN Weiqun (fred.lin@csl-vacuum.com)

    DOI:10.15541/jim20230164

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology