[1] Yinshan Yu, Libing You, Xu Liang, . Progress of excimer lasers technology (invited paper). Chinese Journal of Lasers, 37, 2253-2270(2010).

[2] Qihong Lou. Progress of excimer lasers and its applications. Chinese Journal of Lasers, 21, 361-364, 440(1994).

[3] [3] Liu Jingru. Excimer Laser Technology Applications [M]. Beijing: National Defense Industry Press, 2009. (in Chinese)

[4] [4] Zhao Duliang. Study on key techniques of medical industrial excimer laser system [D]. Hefei: University of Science Technology of China, 2017. (in Chinese)

[5] [5] Bisov V M, Demin A I, Eltsov A V, et al. Development of next generation excimer lasers f industrial applications [C]Proceedings of SPIE, 2003, 5137: 241249.

[6] [6] Bragin I, Misyuryaev T, Targsdf A, et al. Advances in industrial highpower excimer laser technology [C]Proceedings of SPIE, 2008, 7131: 71311B.

[7] [7] Goertler R, Strowitzki C. Progress in the development of compact excimer lasers [C]International Symposium on Gas Flow, Chemical Lasers, HighPower Lasers, SPIE, 2005, 5777: 562565.

[8] Haiyan Shi, Jiangshan Zhao, Xingliang Song, . Analysis on factors affecting energy stability of excimer laser for lithography. Infrared and Laser Engineering, 43, 3540-3546(2014).

[9] [9] Yin Guangyue. Study of key technologies of excimer laser annealing equipments [D]. Hefei: University of Science Technology of China, 2018. (in Chinese)

[10] C Webb. History of gas lasers, part 2: pulsed gas lasers. Optics and Photonics News, 21, 20-27(2010).

[11] Yuanyuan Fan, Yi Zhou, Xin Guo, . Development status and trend of china's excimer laser technology. Strategic Study of CAE, 22, 29-34(2020).

[12] [12] Pflanz T, Huber H. Compact excimer laser light source f optical (mask) inspection systems [C]European Conference on Mask Technology f Integrated Circuits & Microcomponents. International Society f Optics Photonics, 2001.

[13] Lijun Wang, Hangyu Peng, Jun Zhang. Advance on high power diode laser coupling. Chinese Optics, 8, 517-534(2015).

[14] [14] Yuan Demei, An Jun, Tao Bao. Probability Statistics [M]. Beijing: Higher Education Press, 2016. (in Chinese)

[15] [15] Jiang Haifeng, Zhuang Jian, Liu Zhulin. Probability Statistics [M]. Hefei: Press of University of Science Technology of China, 2013. (in Chinese)

[16] Yuxuan Cao, Shili Shu, Fangyuan Sun, . Development of beam combining technology in mid-infrared semiconductor lasers (invited). Infrared and Laser Engineering, 47, 1003002(2018).