Infrared and Laser Engineering, Volume. 53, Issue 1, 20230309(2024)

Improvement of the stability of excimer laser output pulse energy by beam combination

Molin Liu1, Jiayi Liu1, Yizhe Wang1, Xuehao Yu1, Xiaodong Fang1,2, and Libing You1,2
Author Affiliations
  • 1College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
  • 2Shenzhen Shengfang Technology Co., Ltd., Shenzhen 518173, China
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    References(16)

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    [4] [4] Zhao Duliang. Study on key techniques of medical industrial excimer laser system [D]. Hefei: University of Science Technology of China, 2017. (in Chinese)

    [5] [5] Bisov V M, Demin A I, Eltsov A V, et al. Development of next generation excimer lasers f industrial applications [C]Proceedings of SPIE, 2003, 5137: 241249.

    [6] [6] Bragin I, Misyuryaev T, Targsdf A, et al. Advances in industrial highpower excimer laser technology [C]Proceedings of SPIE, 2008, 7131: 71311B.

    [7] [7] Goertler R, Strowitzki C. Progress in the development of compact excimer lasers [C]International Symposium on Gas Flow, Chemical Lasers, HighPower Lasers, SPIE, 2005, 5777: 562565.

    [9] [9] Yin Guangyue. Study of key technologies of excimer laser annealing equipments [D]. Hefei: University of Science Technology of China, 2018. (in Chinese)

    [12] [12] Pflanz T, Huber H. Compact excimer laser light source f optical (mask) inspection systems [C]European Conference on Mask Technology f Integrated Circuits & Microcomponents. International Society f Optics Photonics, 2001.

    [14] [14] Yuan Demei, An Jun, Tao Bao. Probability Statistics [M]. Beijing: Higher Education Press, 2016. (in Chinese)

    [15] [15] Jiang Haifeng, Zhuang Jian, Liu Zhulin. Probability Statistics [M]. Hefei: Press of University of Science Technology of China, 2013. (in Chinese)

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    Molin Liu, Jiayi Liu, Yizhe Wang, Xuehao Yu, Xiaodong Fang, Libing You. Improvement of the stability of excimer laser output pulse energy by beam combination[J]. Infrared and Laser Engineering, 2024, 53(1): 20230309

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    Paper Information

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    Received: May. 18, 2023

    Accepted: --

    Published Online: Mar. 19, 2024

    The Author Email:

    DOI:10.3788/IRLA20230309

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