Infrared and Laser Engineering, Volume. 53, Issue 1, 20230309(2024)
Improvement of the stability of excimer laser output pulse energy by beam combination
Figures & Tables(9)
Fig. 1. (a) Fitting diagram of normal distribution curve of No.1 data; (b) Fitting diagram of normal distribution curve of No.2 data; (c) Fitting diagram of normal distribution curve of No.3 data
Fig. 3. Fitting diagram of normal distribution curve of No.1, No.2 and No.3 data simulation
Fig. 5. (a) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the first laser beam combination; (b) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the second laser beam combination; (c) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the third laser beam combination
Table 1. Statistics of laser output pulse parameters
View tableView in ArticleTable 1. Statistics of laser output pulse parameters
Data number Energy average/mJ Standard deviation Relative standard deviation 1 152.2 1.62 1.06% 2 152.9 1.34 0.88% 3 153.3 1.46 0.95%
Table 2. Statistics of output pulse parameters of any two laser beams
View tableView in ArticleTable 2. Statistics of output pulse parameters of any two laser beams
Parameter Value Data number 4 Energy average/mJ 305.1 Standard deviation 2.14 Relative standard deviation 0.70% Theoretical standard deviation 0.69% Actual theoretical error 1.4%
Table 3. Statistics of combined output pulse parameters of three lasers
View tableView in ArticleTable 3. Statistics of combined output pulse parameters of three lasers
Parameter Value Data number 1+2+3 Energy average/mJ 458.5 Standard deviation 2.77 Relative standard deviation 0.60% Theoretical standard deviation 0.56% Actual theoretical error 7.1%
Table 4. Statistics of output pulse parameters of actual combined beam laser
View tableView in ArticleTable 4. Statistics of output pulse parameters of actual combined beam laser
Data number Equipment number Energy average/mJ Standard deviation Relative standard deviation Theoretical standard deviation Actual theoretical error 1 PLD20 356.6 4.95 1.39% - - PLD30 354.5 4.41 1.24% - - Laser beam combination 687.2 5.95 0.86% 0.93% 7.52% 2 PLD20 368.4 4.19 1.14% - - PLD30 354.5 4.41 1.24% - - Laser beam combination 694.5 5.54 0.79% 0.84% 5.95% 3 PLD20 328.4 4.89 1.49% - - PLD30 331.4 4.50 1.35% - - Laser beam combination 646.8 5.40 0.83% 1.00% 17.00%
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Molin Liu, Jiayi Liu, Yizhe Wang, Xuehao Yu, Xiaodong Fang, Libing You. Improvement of the stability of excimer laser output pulse energy by beam combination[J]. Infrared and Laser Engineering, 2024, 53(1): 20230309
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Received: May. 18, 2023
Accepted: --
Published Online: Mar. 19, 2024
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