Fig. 1. Reflectivity curves at different positions of Mo/Si multilayer sample in range of 210 mm×40 mm^［53］

Fig. 2. （a） Diffraction curves and （b） experimental reflectivity curves of Al（w（Si）=1%）/Zr and Al（Pure）/Zr multilayers

Fig. 3. Relative surface roughness of Al（w（Si）=1%）/Zr multilayers as a function of annealing temperatures

Fig. 4. Theoretical reflectivity curves of Al/Mo/B₄C multilayers at different solar lines

Fig. 5. Reflective performance of ［Al/Mo/B₄C］/SiC and Mo/Si multilayers

Fig. 6. EUV reflectivity curves of Mg/SiC multilayer introducing different thicknesses of Zr barrier layers^［62］

Fig. 7. Cross-section TEM images of Mg/Co multilayer^［62］

Fig. 8. （a） EUV reflectivity curves of Mg/Zr multilayers at different annealing temperatures； （b） Relationship between normalized reflectivity and annealing temperatures of different Mg-based multilayers^［62］

Fig. 9. High resolution TEM bright field images of Sc/Si multilayers

Fig. 10. EUV reflectivity curve of Sc/Si multilayer with γ_Sc=0.65

Fig. 11. Theoretical reflectivity curves of Yb/Al multilayers introducing different thicknesses of SiC surface layer

Fig. 12. Theoretical and measured reflectivity curves of Yb/Al multilayer prepared under 4×10^-5 Pa background vacuum at Ne I 73.59 nm wavelength

Fig. 13. Reflectivity curves of Al+eMgF₂ mirrors （a） and Al+eLiF mirrors （b） prepared at different substrate temperatures

Fig. 14. Reflectivity curves of LaF₃/MgF₂ film in 105-130 nm wavelength range

Fig. 15. Reflectivity curves of LaF₃/MgF₂ film in 105-130 nm wavelength range

Fig. 16. Reflectivity curves of Mo / Si aperiodic broadband multilayer measured at NSRL and BESSY II stations^［90］

Fig. 17. Reflectivity curves with wavelength range （a） and with grazing angle （b） of Mo / Si aperiodic broadband multilayer measured at BSRF stations^［90］

Fig. 18. Polarization efficiency and measured reflectivities of Mo/Y multilayer broadband polarizer^［86］

Fig. 19. Calculated and fitted phase shifts and measured transmission as function of wavelength at grazing incidence angles of 47°and 54°^［90］

Fig. 20. Circular radiation from BESSY UE56/1-PGM beamline as functions of wavelength