High Power Laser Science and Engineering, Volume. 2, Issue 3, 03000e26(2014)
EUV ablation of organic polymers at a high fluence
[1] C. Phipps. Laser Ablation and its Applications(2006).
[12] M. J. Bowden, J. H. O’Donnell. Dev. Polym. Degrad., 6, 21(1985).
[16] L. Vyvsín, T. Burian, J. Chalupský, M. Grisham, V. Hájková, S. Heinbuch, K. Jakubczak, D. Martz, T. Mocek, P. Pira, J. Polan, J. J. Rocca, B. Rus, J. Sobota, L. Juha. Proc. SPIE, 7361, 73610O(2009).
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Chiara Liberatore, Klaus Mann, Matthias Muller, Ladislav Pina, Libor Juha, Jorge J. Rocca, Akira Endo, and Tomas Mocek. EUV ablation of organic polymers at a high fluence[J]. High Power Laser Science and Engineering, 2014, 2(3): 03000e26
Category: regular articles
Received: Mar. 3, 2014
Accepted: May. 9, 2014
Published Online: Nov. 5, 2014
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