High Power Laser Science and Engineering, Volume. 2, Issue 3, 03000e26(2014)
EUV ablation of organic polymers at a high fluence
Fig. 2. LLG source at a wavelength of 13.5 nm: example of caustic (bottom) and dependence of ablation depth on the number of shots (top). Measurements on PMMA.
Fig. 3. CDL at a wavelength of 46.9 nm: caustic measurement wavelength 46.9 nm (below) and ablation measurement (top). The shape of the crater is almost the same along the line of the caustic. Looking at the image on the right it can be seen that the annular form is preserved although, on increasing the number of shots, its dimensions increase.
Fig. 4. CDL at a wavelength of 46.9 nm: eroded area on number of shots (100–200 shots, bottom; 10–100 shots, top).
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Chiara Liberatore, Klaus Mann, Matthias Muller, Ladislav Pina, Libor Juha, Jorge J. Rocca, Akira Endo, and Tomas Mocek. EUV ablation of organic polymers at a high fluence[J]. High Power Laser Science and Engineering, 2014, 2(3): 03000e26
Category: regular articles
Received: Mar. 3, 2014
Accepted: May. 9, 2014
Published Online: Nov. 5, 2014
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