Optics and Precision Engineering, Volume. 22, Issue 8, 2142(2014)
Design and testing of deflecting mirror system of X-ray interference lithography beamline
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GONG Xue-peng, LU Qi-peng, PENG Zhong-qi. Design and testing of deflecting mirror system of X-ray interference lithography beamline[J]. Optics and Precision Engineering, 2014, 22(8): 2142
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Received: Nov. 12, 2013
Accepted: --
Published Online: Sep. 15, 2014
The Author Email: Xue-peng GONG (gongxuepeng120@foxmail.com)
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