Laser & Optoelectronics Progress, Volume. 49, Issue 12, 121201(2012)
Polarized Light Reflection Method for Measuring Thin Film Parameters
[1] [1] Huang Zuohua, He Zhenjiang, Yang Guanling et al.. The multifunctional ellipsometer[J]. Optical Technique, 2001, 27(9): 432~434
[2] [2] Huang Zuohua, He Zhenjiang. The optical methods for measuring the thickness and refractive index of thin films[J]. Modern Scientific Instruments, 2003, (4): 42~44
[3] [3] M. Chiu, J. Lee, D. Su. Complex refractive-index measurement based on Fresnel′s equations and the use of heterodyne interefrometry[J]. Appl. Opt., 1999, 38(13): 2936~2939
[4] [4] R. M. A. Azzam, A. R. M. Zaghloul. Polarization-independent reflectance matching (PRIM): a technique for the determination of the refractive index and thickness of transparent films[J]. J. Opt., 1977, 8(3): 201~205
[5] [5] H. Nodera, I. Awai, J. I. Lkenoue. Refractive index measurement of bulk materials: prism coupling method[J]. Appl. Opt., 1983, 22(8): 1944~1947
[6] [6] P. K. Tien, R. Ulrioh. Theory of prism-film coupler and thin-film light guides[J]. J. Opt. Soc. Am., 1970, 60(10): 1325~1337
[8] [8] Fang Junxin, Cao Zhuangqi, Yang Fuzi. Waveguide Technology Physical Basis[M]. Shanghai: Shanghai Jiao Tong University Press, 1987. 204~224
[10] [10] Allan Rosencwaig, Jon Opsal, D. L. Willenborg et al.. Beam profile reflectometry: a newtechnique for dielectric film measurements[J]. Appl. Phys. Lett., 1992, 60(11): 1301~1303
[11] [11] Tami Kihara, Kiyoshi Yokomori. Simultaneous measurement of refractive index and thickness of thin film by polarized reflectances[J]. Appl. Opt., 1990, 29(34): 5069~5073
[12] [12] L. Wood, J. W. Fleming. Computerized refractive index measurement for bulk materials at UV, visible, and IR wavelengths[J]. Rev. Sci. Instrum., 1982, 53(1): 43~47
[14] [14] Wang Jiaxian, Li Junjie, Wu Wenguang et al.. Coupled-mode characteristics of coupled-microdisks and single microdisk cavity with an output waveguide[J]. Acta Optica Sinica, 2011, 31(1): 0106006
[16] [16] Cui Naidi, Liang Jingqiu, Liang Zhongzhu et al.. Photonic crystal single channel side-coupled waveguide with parallel resonators[J]. Acta Optica Sinica, 2012, 32(2): 0223001
[17] [17] Zhang Shaodi, Sun Honghai. High precision method of long-ranged laser spot position measurement[J]. Chinese J. Lasers, 2012, 39(7): 0708003
Get Citation
Copy Citation Text
Zhou Jinzhao, Yu Wenfang, Huang Zuohua. Polarized Light Reflection Method for Measuring Thin Film Parameters[J]. Laser & Optoelectronics Progress, 2012, 49(12): 121201
Category: Instrumentation, Measurement and Metrology
Received: Aug. 8, 2012
Accepted: --
Published Online: Oct. 19, 2012
The Author Email: Jinzhao Zhou (zzzhoujinzhao@126.com)