Acta Photonica Sinica, Volume. 49, Issue 3, 0322003(2020)

Correction Methods of Adjustment Errors for the Parallel Plate-based Lateral-shearing Interferometer

Jian-biao ZHOU... Mu-yang ZHANG and Yan-mei LIANG* |Show fewer author(s)
Author Affiliations
  • Institute of Modern Optics, Nankai University, Tianjin 300350, China
  • show less
    References(10)

    [1] [1] CHATTERJEE A, DHANOTIA J, BHATIA V, et al. Simultaneous measurement of thickness refractive index using wedge plate lateral shearing interferometry Fourier transfm method[C]. International Conference on Computer Applications In Electrical EngineeringRecent Advances, Rokee, India: IEEE, 2017, 381384.

    [3] [3] OKUMAJ, IGASAKI Y. Collimation evaluation device collimation evaluation method: U.S. 10260987[P]. 2019416.

    [5] Ji-ping ZOU, B WATTELLIER. Adaptive optics for high-peak-power lasers-an optical adaptive closed-loop used for high-energy short-pulse laser facilities: laser wave-front correction and focal-spot shaping(2012).

    [9] [9] HASEGAWA M, OUCHI C, HASEGAWA T, et al.Recent progress of EUV wavefront metrology in EUVA[C]. SPIE, 2004, 5533: 2736.

    Tools

    Get Citation

    Copy Citation Text

    Jian-biao ZHOU, Mu-yang ZHANG, Yan-mei LIANG. Correction Methods of Adjustment Errors for the Parallel Plate-based Lateral-shearing Interferometer[J]. Acta Photonica Sinica, 2020, 49(3): 0322003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 11, 2019

    Accepted: Feb. 16, 2020

    Published Online: Apr. 24, 2020

    The Author Email: LIANG Yan-mei (ymliang@nankai.edu.cn)

    DOI:10.3788/gzxb20204903.0322003

    Topics