Acta Photonica Sinica, Volume. 49, Issue 3, 0322003(2020)
Correction Methods of Adjustment Errors for the Parallel Plate-based Lateral-shearing Interferometer
Figures & Tables(7)
Fig. 1. Schematic diagram of the parallel plate-based lateral-shearing interferometer
Fig. 2. Flow chart of adjustment of the angle error of the parallel plate
Fig. 4. Relationship between the angle error of the parallel plate and Δ
Fig. 5. Repeatability of relationship between the angle error of the parallel plate and Δ
Fig. 6. Relationship between the angle error and Δ
Table 1. Comparison of fitting results using different number of terms
View tableView in ArticleTable 1. Comparison of fitting results using different number of terms
Zernike terms 6 terms 13 terms 20 terms Relationship of Δ a 6and δ Δ a 6－6=－7.678×10－5·δ －4.089×10－6Δ a 6－13=－7.736×10－5·δ －2.7×10－4Δ a 6－20=－8.239×10－5·δ －3.7×10－4R 20.999 7 0.999 6 0.999 6 Angle error at δ =00.02″ 1.19″ 1.63″
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Jian-biao ZHOU, Mu-yang ZHANG, Yan-mei LIANG. Correction Methods of Adjustment Errors for the Parallel Plate-based Lateral-shearing Interferometer[J]. Acta Photonica Sinica, 2020, 49(3): 0322003
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Received: Oct. 11, 2019
Accepted: Feb. 16, 2020
Published Online: Apr. 24, 2020
The Author Email: LIANG Yan-mei (ymliang@nankai.edu.cn)
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